LAM 2300 System Platform

• S/N: 1001862-06-23-20257
• 2006 vintage
• 3 Open Cassette Load Stations
• 25 Slot Input Buffer Station
• Side and Front Monitor User Interface
• UPS Circuitry
• 100 Ft. TM-Subpanel Cable
• Configured for 200mm Wafers, 300mm capable with kit change

 Qty 4 Exelan FLEX DD Process Modules

• 1600 L/S Edwards Turbo Pump (One per chamber)
• PM ISO Valve: Chemraz Rocker Valve (One per chamber)
• NSR6254_A: BP Kit (One per chamber)
• 2300 Exelan FLEX, IGS Type Gas Box (One per chamber) with 9 standard gas lines and 7 optional gas lines (16 total per chamber) with top exhaust and Qty. 16 Unit U8561 MFCs
• Gasses: C4F8; NA; O2; CO; CH3F; H2; CH2F2; N2; CHF3; AR; HE; CF4
• Chamber D down (vacuum pump), other three operational

Tool Idled 12/09/2008

Tool is installed and operational

Buyer responsible for deinstall, rigging and crating

Inspection available upon request